1R85-447875-12
PILLEY ASSY､YTENSION
東京エレクトロン (TEL)
1R85-436074-14
M/A Y軸プーリ
1R85-436073-15
M/A TENSION PULLEY ASSY
1R85-425374-11
X2 REAR PULLEY ASSY
1R85-418670-11
Z AXIS BALL SCREW
1R85-418067-14
REDUCTION GEAR ASSY
1R85-410841-12
プーリー
1R85-409142-13
X FRONT PULLEY ASSY
1R85-405833-14
REDUCTION PULLEY ASSY
1R85-404318-17
1R85-402514-14
フレキシブルチャック
1R85-401262-13
M/A YアイドラーASSY
1R81-606778-12
LCD ER USER BOARD
1R81-606384-14
LCD COAT USER BOARD
1R81-606159-13
BOARD LEAK COLLECTING No#2
1R81-605885-11
CONTROL BOARD
1R81-605884-11
1R81-605638-11
LCDEUMMYBOARD(COAT)
1R81-605313-14
CF DEV UNIT CONN BOARD
1R81-605300-16
CS501CT/ER UNIT CONN BOARD
