0100-66025 REV P2
PERSONALITY BOARD
AKT
0100-66014 REV E2
EXHAUST SWITCHING
0100-66011 REV E2
FACTORY AUTOMATIOM/LOADLOCK DISTRIBUTION
0100-66003 REV E8
TEMP MONITOR
0100-66002 REV E4
0100-66000
0100-65520 REV E7
CHAMBER PRIMARY DISTRIBUTION
0100-65520 REV E6
0100-65496 REV E7
CHAMBER GAS BACKPLANE
0100-65496 REV C
BES-504-8
ACLS CASSETTE CLAMP AIR VALVE
0100-71004
CASSETTE LOADER STESTION DISTRIBUTION ASSY
0020-72013-E2
基板センサー
0010-71006
ASSY VME CONTROLLER CHAMBER
0100-71018
CVD CHAMBER PRIMARY DISTRBUTION
0100-66002
SUSCEPTER TEMP MONITOR
0100-65496
ASSY CHAMBER GAS BAGKPLANE PCB
RVG1600
VAC Robot SERVO AMPLIFIER
3870-01483
VALVE AIR PRESS OPERATED
3630-01110
RTNR RING EXT.75OD
