0660-01501
MOTHER BOARD
AKT
0660-01500
0660-01499
0660-01410
DAUGHTER BOARD
0660-01381
0100-76124
DIGITAL I/O BOARD
0100-66025 REV P2
PERSONALITY BOARD
0100-66014 REV E2
EXHAUST SWITCHING
0100-66011 REV E2
FACTORY AUTOMATIOM/LOADLOCK DISTRIBUTION
0100-66003 REV E8
TEMP MONITOR
0100-66002 REV E4
0100-66000
0100-65520 REV E7
CHAMBER PRIMARY DISTRIBUTION
0100-65520 REV E6
0100-65496 REV E7
CHAMBER GAS BACKPLANE
0100-65496 REV C
A81-510230-H1
TSBC-BUS-I/F-C
東京エレクトロン (TEL)
1A81-010400-I1
UIFC CONN BRD
1A81-010400-D2
1A81-010342-21
TSBC EPD I/F BRD-B
